Focused Ion Beam (FIB)
Dual Beam Focused Ion Beam microscopes (DB-FIBs) are an indispensable tool in modern characterization facilities. They consist of a high-resolution Scanning Electron Microscope (SEM) column for sample imaging combined with a fine-probe ion source for sample milling and manipulation. These instruments are powerful tools for nano-machining as well as preparation of site-specific micron-scale samples (e.g. TEM foils) from within specific areas of larger samples. When combined with an in situ sample lift-out system, DB-FIBs allow for preparation and extraction of TEM samples without the need for any support films - a critical feature that enables users to utilize the full range of capabilities in modern high resolution TEMs.
This extremely versatile combination of sputtering, imaging, and analytical capabilities makes dual beam FIBs key componets of any world class nano-characterization facility.