Leica ACE600 Sputter Coater
Sputter coater for high-resolution small-grain sample coatings. Can deposit extremely thin Au, Ir, or C films of reproducible thickness, which are required for high-resolution SEM imaging. Because of the better vacuum from the turbo-pump vacuum system, it can produce much finer grain films than standard sputter coating systems. For other purposes, it has a carbon thread type carbon deposition capability and can deposit films as thin as a few nm. Unit also has ability to generate a glow-discharge for cleaning and hydrophilizing sample surfaces. Large sample chamber allows coating or treating many samples at once. Once appropriate preparation conditions are determined, automated procedures of the unit allow for reproducible results.